The plurality of gas channels is connected to an edge gasplenum surrounding the substrate support.
该多个气体通道连接至一个围绕该 基片支撑件的边缘气体室。
2
This gasplenum is used to capture the fission products which are gasses such that the fuel pin does not over-pressurise.
这个气体空间曾用来获取裂变，气体生成物，这样，燃料大头针，就不会被过度增压。
3
The edge gasplenum is connected to a central gasplenum disposed within and near the center of the substrate support through a plurality of gas supply channels.