TITAN ion source is a new ion source which can produce strong metal and gasion beam. Use.
TITAN离子源是一种新的能够同时产生强金属和气体离子束流的离子源。
2
The experiment shows that the gasion source provides obvious pulverization for metal particles.
实验结果表明:气体离子源具有明显的细化金属颗粒的作用。
3
ABSTRACT: in this paper a reactive ion plating method and system configuration of Gasion source enhanced Magnetron Sputtering (GIMS) is presented in details.