Influence of discharge parameters such as RF power and working pressure on the negative self-bias voltage of substrate was investigated by an oscilloscope with a highvoltageprobe.
采用高压探头示波器系统研究了射频辉光放电参数对自偏压的影响规律。
2
According to the arrangement of thyristors in HVDC converter valve, the configuration of a highvoltage resistive probe used for impulse voltage measurement has been designed especially.