The heated oxidation film of U-Nb alloy is studied by auger electron spectroscopy (AES) at different temperature in the highvacuumchamber.
用俄歇电子能谱（AES）研究了高真空下，环境温度对铀铌合金真空氧化膜的影响。
2
The influence of water vapor content in highvacuumchamber during the coating process on physical properties of HfO2 films was investigated.
本文研究了在镀膜过程中真空室内水蒸气的含量对HfO2薄膜物理性能的影响。
3
The plasma source ion implantation device consists of pulsed negative high voltage power, hot cathode arc discharge system, vacuumchamber and target stage, vacuum system and monitor system.