In the present paper, the relation between diamond nucleation density and synthesis conditions is studied for the diamond thin film synthesized by hotfilament chemical vapour deposition method.
本文研究了用热灯丝化学气相沉积方法在单晶硅衬底上制备金刚石薄膜时其成核密度与制备条件的关系。
2
B-doped diamond films were grown on graphite substrates by hotfilament assisted CVD method (HFCVD).
采用固体三氧化二硼，用热丝辅助化学气相沉积法在石墨衬底上沉积了掺硼金刚石涂层。
3
B-doped diamond films were grown on graphite substrates by hotfilament assisted CVD method (HFCVD). The dopant was solid B_2O_3.