In the paper, the enhancing process of diamond nucleation by negative substrate bias in hotfilamentCVD system was analyzed.
对利用热灯丝cvd沉积金刚石膜时负衬底偏压增强金刚石的核化过程进行了分析。
2
Carbon nanotubes (CNTs) were deposited by hotfilamentCVD and their structures were investigated by scanning electron microscopy and transmission electron microscopy.
用热丝化学气相沉积制备了碳纳米管，并用扫描电子显微镜和透射电子显微镜研究了它们的结构。
3
An improved hot - filamentCVD system was developed to deposit diamond films.