The results show that, the gas pressure, electrical current, and the virtual breadth of the annularelectrode affect the radial distribution of the plasma density and temperature.
结果表明,放电气压、电流以及环电极的有效宽度均影响等离子体密度和温度的径向分布。
2
But the lessening of virtual breadth of the annularelectrode makes the radial distribution of plasma density more unequal, and the total density and the average temperature lower.
但环电极有效宽度的减小使得等离子体密度的分布更不均匀,并使总的密度和平均温度均下降。
3
A sensor in the utility model adopts a no-leakage PH composite electrode and an annular conductance electrode in which a temperature sensor is arranged.