The method is qualified for measurement of groove depth and duty cycle simultaneously for the rectangle-shaped or similar profile of holographic grating mask.
对于要求同时检测矩形或接近矩形槽形的全息光刻胶光栅掩模的槽深和占宽比，该方法完全适用。
2
Alternatively holographicmask or an array of micro lenses may be used to focus the laser beams to the vias to fill them with metal.
另外全息面具或者微透镜阵列，可用于集中的激光束的孔，以填补他们的金属。
3
By use of optical holographic theory, achromatic optical system on recording holographic BSG mask is designed. Its aberration is analyzed by using ZEMAX.