The results show that the damaged layer of silicon cut by WEDM mainly appears massive impurity elements, remelted and elastic distortion with a highdensity dislocation.
结果表明：电火花线切割单晶硅损伤层主要由杂质元素重污染层、重熔层和含有高密度位错的弹性畸变层组成；
2
Electric double-layer capacitors (EDLC) exhibit very high storage energy density compared with other capacitors, but their inner resistance is rather higher and output voltage lower.
在储能电容器中，双电层电容器的储能密度特别高，但其内电阻大，且元件的输出电压低。
3
The filter media further includes a dielectric material layer having a relative highdensity and a subsequent dielectric material layer having a relative lower density.