There is a gaseous secondary electrondetector (GSED) in the chamber in ESEM' which offers new functions.
ESEM是在传统的SEM样品室中多一个GSED探头,因此,它在传统的SEM基础上增添了新的功能。
2
The second is using a secondary electrondetector that could function in this non vacuum sample environment.
二是使用了一个在样品室非真空环境下仍然能起作用的二次电子探头。
3
The multi-stage vacuum system and gaseous secondary electrondetector(GSED) for environmental scanning electron microscope(ESEM) were simply introduced and the basic principle of ESEM was discussed.