The thin film can be prepared by a plurality of film plating techniques such as high vacuum thermal evaporation, electronbeamdeposition and sputtering.
该薄膜可采用高真空热蒸发、电子束沉积以及溅射等多种镀膜技术制备。
2
DOE's fabrication techniques mainly include laser beam or electronbeam writing, RIE, ion milling and thin film deposition.
衍射光学元件的制作技术主要包括激光或电子束直写、反应离子刻蚀、离子束铣及薄膜沉积。
3
A novel process combining the self-assembly technique with electronbeam lithography and selective chemical deposition was proposed for patterned film preparation.