In order to improve the efficiency for coupled electromechanical analysis of MEMS system, a new efficient numerical approach for electrostatic MEMS with small deformations is presented.
Electromechanical integrated; Toroidal drive; Manufacture of the stator; Manufacture of the toroidal worm; Curved beam; Minimum energy method; Efficiency.
机电集成； 超环面传动； 定子加工； 环面蜗杆加工； 曲线梁； 最小能量法； 效率。
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The utility model is a high-efficiency and energy-saving electromechanical product with simple structure and convenient use, which is worth promoting.