In this paper, a probe of vacuum microbalance to monitor and measure for high accuracy of filmthickness is introduced, thermostatic probe of the semiconductor refrigeration device.
本文研制了一种用于高精度膜厚监测的真空微量天平探头：半导体致冷器件恒温探头。
2
The particular requirement on substrate materials selecting, thin film structure design and monitor and control of thin filmthickness has been discussed.