When discharge is full of discharge gap, each equivalentdischarge parameter is around definite numerical value.
当放电充满整个间隙时,各等效放电参量在相同激励频率下基本保持在一定值附近。
2
Selfnegative bias on insulate substrate surface of rf glow discharge plasma reactors is studied theoretically. The mathematical analysis has been obtained by equivalent circuit method.