A fiber Fizeauinterferometer for measurement of micro-vibration of MEMS devices is presented, which is simple in configuration and easy to operate.
提出一种结构简单、使用方便的用于微电子机械部件运动状态测量的光纤斐索干涉装置。
2
A fiber optic ultrasonic sensor based on Fizeauinterferometer for the measurement of ultrasonic wave propagated on the surface of a solid plate has been proposed and demonstrated.
验证了一种基于光纤Fizeau干涉仪的声发射传感器，可用于固体表面传播的超声波的检测。
3
With the Fresnel diffraction approximation method, the influences of the collimated lens and standard lens surface errors on the transparence testing are analyzed in Fizeauinterferometer.