Epitaxialdeposition is then used to form an epitaxial layer on the epitaxy surface.
外延沉积接着用以形成一外延层于该外延表面上。
2
An epitaxialdeposition process including a dry etch process, followed by an epitaxialdeposition process is disclosed.
本发明提供一外延沉积工艺,其包含干式蚀刻工艺与后续的外延沉积工艺。
3
The major aspects of the recent development in the growth, characterization and applications of the hetero epitaxial diamond films by chemical vapor deposition were reviewed.