The influence of various experimental parameters on deposition rate film composition and hardness has been studied, Bias is considered as the most effective Darameter.
研究了各种实验参数对沉积速率、薄膜组成及膜层硬度的影响，认为偏压是最具影响的参数。
2
Through study of laser detector microwave bias, the useful method of microwave bias is given. And the experimental results are given.
本文通过对激光探测器微波偏置的研究，提出了实用的偏置方法，并给出了实验结果。
3
To find an effective method to reduce bias of remaining dentin thickness between groups during experimental dentin bond test.