It USES edgelocalization and curve fitting to solve one dimension displacement field and calculate the error.
面形检测采用边缘定位的方法，并且结合了曲线拟合的方法求解一维位移场来计算误差。
2
From the results of experimentation, the method can make the mark image edge achieve good edgelocalization and improve the alignment precision.
从实验的结果来看，这种方法能够对对准标记达到很好的边缘定位，提高了对准精度。
3
This paper presents an adaptive exponential filter used for edge detection. It can be designed to eliminate the noise of image and obtain good precision of edgelocalization.