Because of the effect of energy particles on the amorphous films, ion implantation action was produced and nitrogen content in the surface was increased.
载能粒子对非晶薄膜的作用,产生氮离子注入效应,使表层的含氮量增加。
2
The effects of ion implantation on the formations of amorphous alloys and compounds, grain refinement and surface modification are described as the results of such studies.